Solution| LANBAO Teflon capacitive sensor liquid level detection application sharing
Release time:
2023-05-30 15:51
Source:
Silicon wafer cleaning equipment is one of the indispensable equipment in the semiconductor manufacturing process. It is mainly used to clean impurities and contaminants on the surface of silicon wafers to ensure the quality and stability of silicon wafers. In the silicon wafer cleaning process, the control of liquid level is very important, because the liquid level is too low or too high, which will affect the cleaning effect. In order to solve this problem, liquid level sensors are widely used in silicon wafer cleaning equipment, mainly used to detect the liquid level height, thereby ensuring the cleaning effect of the silicon wafer and the normal operation of the equipment.
In this article, we will focus on the specific application and product features of Lambert Teflon capacitive sensor CR18XT series in liquid level detection.。

IP67, the shell adopts an integrated PTFE design, and the liquid level detection is reliable and stable.
The IP67 dustproof and waterproof design of this product can prevent fine dust, impurities, especially bubbles, water vapor, etc. from affecting product performance. At the same time, the outer shell adopts an integrated PTFE design, which has the characteristics of waterproof, moisture-proof, oil-resistant, chemical corrosion resistance, and good electrical insulation. It can avoid damage to the product by chemicals in the cleaning solution. It can not only achieve stable liquid level detection, but also ensure the sensor service life.
High detection accuracy, can monitor liquid level in real time
The detection distance of this product is adjustable from 3 to 15mm, and the repeatability error is ≤5%. After it is installed on the side wall of the cleaning tank, when the liquid level in the tank reaches the set height of the liquid level, the sensor outputs liquid through changes in the electric field value. bit signal, the supply of cleaning fluid will also stop at this time, which not only avoids the waste of cleaning fluid, but also better ensures the silicon wafer cleaning speed and cleaning effect.
Strong anti-interference ability, meeting the needs of complex working conditions
This product adopts reliable circuit and process design, has excellent EMC performance, can avoid the impact of electromagnetic interference on the sensor, and has good shielding function under working conditions such as frequency converters and servo motors, thus completing the detection task excellently.
Multiple protections, safer to use
This product adopts various protection circuits such as short circuit, overload and reverse polarity. When a short circuit occurs, it can prevent large current from passing through and avoid damage to the product and load; when the equipment is overloaded, the overload protection will automatically disconnect the power supply to prevent the equipment from being damaged; when the positive and negative poles of the power supply are connected reversely, the overload protection can be reversed to prevent the equipment from being damaged. The polarity protection circuit prevents the product from burning out, thereby living up to expectations and successfully completing the detection task.
In addition to the above features, this sensor also has features such as adjustable distance, high voltage resistance, and insulation resistance. As an important device in the silicon wafer cleaning process, it can not only reduce manual intervention and work errors, realize automatic control of cleaning fluid, but also ensure the quality of silicon wafer cleaning. As an advanced domestic supplier of industrial sensors and measurement and control systems, Lanbao Sensing has specialized in sensing technology and sensing and measurement and control systems for more than 20 years. It has always provided customers with professional testing solutions to help you solve project testing problems.
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